Fabrication of Polymeric Multimode Waveguides and Devices in SU-8 Photoresist Using Selective Polymerization

Large cross section multimode waveguides have been realized in SU-8 using selective polymerization. SU-8 is a negative photoresist, which has shown good optical properties and it is mechanically and chemically stable. The fabricated waveguides have very smooth sidewalls and exhibit low optical losses. The fabrication method is simple and potentially very cost effective. N x N and 1 x N multimode power splitters have been realized using this fabrication technology.